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Download Radio-Frequency Capacitive Discharges epub

by Yuri P. Raizer,Mikhail N. Shneider,Nikolai A. Yatsenko




The first publication of its kind in the field, this book describes comprehensively and systematically radio-frequency (rf) capacitive gas discharges of intermediate and low pressure and their application to gas laser excitation and to plasma processing. Text presents the physics underlying rf discharges along with techniques for obtaining such discharges, experimental methods and results, and theoretical and numerical modeling findings. Radio-Frequency Capacitive Discharges is written by well-known specialists in the field, authors of many theoretical and experimental works. They provide simple and clear discussions of complicated physical phenomena. A complete review on the state of the art is included. This interesting new book can be used as a textbook for students and postgraduates and as a comprehensive guidebook by specialists.
Download Radio-Frequency Capacitive Discharges epub
ISBN: 0849386446
ISBN13: 978-0849386442
Category: Engineering
Subcategory: Engineering
Author: Yuri P. Raizer,Mikhail N. Shneider,Nikolai A. Yatsenko
Language: English
Publisher: CRC Press; 1 edition (April 24, 1995)
Pages: 304 pages
ePUB size: 1156 kb
FB2 size: 1829 kb
Rating: 4.9
Votes: 264
Other Formats: lrf txt docx rtf